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ATH-M Series(全磁浮渦輪分子幫浦)
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ATH 400M, ATH1300M ,ATH1600M,ATH2300M
300~2100 l/s pumping speed 設計
全新磁浮五向動平橫 & N2 purge & Heater 設計
適用PVD, CVD, Etch製程 |
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應用領域
- Glass coating,
- Micro systems machining,
- Ion beam rectification,
- Electron microscopy,
- Space simulation chambers,
- Particle accelerators,
- Semiconductor processes (etch, CVD, ion implant),
- Coating and thin films deposition,
- Ion milling
- And many R&D experiments
規格資料
型號 |
抽氣法蘭 |
抽氣效率for N2 |
安裝方向 |
ATH 400M |
ISO 100/160 |
410 l/s |
Any |
ATH 1300M |
ISO 160/200 |
1250 l/s |
Any |
ATH 1600M |
ISO 200/250 |
1500 l/s |
Any |
ATH 2300M |
ISO 250 |
2100 l/s |
Any |
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