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中英友科技有限公司
地址: 新竹縣竹北市縣政十一街81號
TEL: 886-3-558-8099
FAX: 886-3-558-8299
E-MAIL: ptpump.m31@msa.hinet.net

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Manufacturers

ATH-M Series(全磁浮渦輪分子幫浦)

ATH-M Series(全磁浮渦輪分子幫浦)

ATH 400M, ATH1300M ,ATH1600M,ATH2300M
300~2100 l/s pumping speed 設計
全新磁浮五向動平橫 & N2 purge & Heater 設計
適用PVD, CVD, Etch製程

應用領域

Glass coating,
Micro systems machining,
Ion beam rectification,
Electron microscopy,
Space simulation chambers,
Particle accelerators,
Semiconductor processes (etch, CVD, ion implant),
Coating and thin films deposition,
Ion milling
And many R&D experiments

規格資料

型號	抽氣法蘭	抽氣效率for N2	安裝方向
ATH 400M	ISO 100/160	410 l/s	Any
ATH 1300M	ISO 160/200	1250 l/s	Any
ATH 1600M	ISO 200/250	1500 l/s	Any
ATH 2300M	ISO 250	2100 l/s	Any

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